CVD apparatus M1-716 This is the reacting furnace to conduct "Chemical Vapor Deposition (CVD)". This apparatus is designed to synthesize carbon nanotube or carbon nanocoil efficiently and stably. In CVD method, nanotube and nanocoil grow up with a core of catalyst on the condition that carbon is derived by thermal decomposition of gas at hydrogen or helium ambience, and metallic catalyst exist on the substance or bob up and down in reaction tube. |